Measurements of miniaturized piezoresistive MEMS pressure sensors in a harsh environment : advanced temperature compensation technique
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- Today’s world overflows with plenty of data acquisition types. Amongst them, pressure sensing plays a crucial role. In this context, piezoresistive pressure MEMS (micro-electromechanical sys- tems) represent a very large share of the MEMS sensor market. This market, valued at $2439.5M in 2020, reaches fields such as automotive, medical and aerospace industries. The demand for this type of sensor is increasing for use in harsh and high temperature environ- ments. Unfortunately, this strongly impacts the accuracy and performances of the semiconductors used in these devices. This makes it difficult to acquire relevant measurements at precise locations for wide ranges of temperature. This work will focus on the improvement of the calibration technique of pressure piezoresistive MEMS. Based on an already existing low-cost compensation technique, the goal is to find a mathematical model to describe precisely the variation of the pressure measurement with respect to an applied temperature, for various temperatures. An improvement of the method with parameters of higher polynomial order has been found. A multi-polynomial model which gives three degrees of freedom stands out, giving pressure results with a few mbar accuracy in the test ranges from 1 to 2 bar and from 25 to 100°C.