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Influence of graphene on the mechanical properties of copper thin films

(2021)

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deVinckdeWinnezeele_29741600_2021.pdf
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Abstract
One way of producing graphene is by CVD growth on thin copper film, making it interesting to know the influence of graphene on the mechanical properties of copper. For this purpose, a process of a lab-on-chip uniaxial tensile test on copper/graphene with nickel actuators is determined. The results of this tensile test were compared with the results of lab-on-chip on copper and graphene separately. The interpretation of the results shows different things. 1. Nickel is not an ideal actuator, as it shows plasticity during actuation and relaxes over time. This makes the mismatch calculation with auto-actuated structures not accurate, the best solution is to measure the free beams. 2. Graphene has a real influence on the displacement measurements, its force contribution can not be considered as negligible. 3. The creep rate of copper/graphene seems to be higher than that of copper, due to poor adhesion between copper and graphene, a lack of measurements and a sample quality that needs to be improved. The average measured stress is lower for copper/graphene than for copper.