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RF characterization of the back-gate contact on Fully Depleted SOI MOSFETs

(2020)

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Vanbrabant_12291500_2020.pdf
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Abstract
Thanks to the thin buried-oxide, the UTBB FDSOI technology with a highly doped region under the BOX is one of the main candidates for future RF applications. One of the most interesting feature of this technology is the possibility to tune the threshold voltage, compensate variability issues and improve the overall device performance. In this work, the impact of the back-gate bias is mainly studied on the threshold voltage and RF FoMs of the front and back-gates.