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Quantum bits coupling through titanium nitride superconducting nanostructures

(2024)

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Moulin_43151900_2024.pdf
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Abstract
As quantum computing is expanding at an increasingly fast pace, the qubits’ hosted by the quantum processing chip are getting increasingly crowded. Yet, close proximity interactions between two qubits become rare as they are getting further apart in complex architectures, separated by many physical gates connections and many other qubits. This Master's thesis aimed at implementing titanium nitride superconducting nanostructures as a mean to couple and apply quantum gates on two distant qubits to be implemented in silicon, given the similarities between spin qubits and complementary metal-oxide-semiconductor transistors. Fabrication of titanium nitride by atomic layer deposition was prospected, and some key steps for designing quantum chips have been established. In particular, nanofabrication protocols for the realization of titanium nitride resonators and vias were put forward.