ATTENTION/WARNING - NE PAS DƉPOSER ICI/DO NOT SUBMIT HERE

Ceci est la version de TEST de DIAL.mem. Veuillez ne pas soumettre votre mƩmoire sur ce site mais bien Ơ l'URL suivante: 'https://thesis.dial.uclouvain.be'.
This is the TEST version of DIAL.mem. Please use the following URL to submit your master thesis: 'https://thesis.dial.uclouvain.be'.
 

Enhancement of the optical properties of silicon devices through strain engineering

Marichal, Raphaƫl
(2021)

Files

Marichal_49391600_2021.pdf
  • Open access
  • Adobe PDF
  • 20.63 MB
Download

Details

Supervisors
Raskin, Jean-Pierre ; Pardoen, Thomas ; Flandre, Denis
Faculty
Ecole polytechnique de Louvain
Degree label
Master [120] : ingƩnieur civil physicien, Ơ finalitƩ spƩcialisƩe
Abstract
The trend towards miniaturization of electronic devices requires to evaluate the change of physical properties of materials at nanoscale. The present work aims at developing an on-chip laboratory devoted to put a silicon thin film specimen under biaxial loading, and to investigate the change of its materials properties. Finite elements simulations are used to derive convenient specimen designs, and to extract a set of dimensions allowing to sweep a range of strains from 0.001 to 0.04. Labs on-chip are then fabricated in cleanroom, using SOI technology.